# AMTECH SYSTEMS INC — DEF 14A

AMTECH SYSTEMS INC of TEMPE, AZ filed a DEF 14A with the SEC on 2026-01-23. Industry: Special Industry Machinery, NEC.

## Filing

- Filed: 2026-01-23
- Form: DEF 14A
- Accession: 0001193125-26-020762
- Registrant: AMTECH SYSTEMS INC
- CIK: 0000720500
- Industry (SIC): Special Industry Machinery, NEC (3559)
- State of incorporation: AZ
- Location: TEMPE, AZ

## Documents (6)

| Seq | Type | Description |
| --- | --- | --- |
| 1 | DEF 14A | DEF 14A |
| 2 | GRAPHIC | GRAPHIC |
| 3 | GRAPHIC | GRAPHIC |
| 4 | GRAPHIC | GRAPHIC |
| 5 | EX-101.SCH | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT |
| 18 | XML | EXTRACTED XBRL INSTANCE DOCUMENT |

## Filing timeline for this registrant (44)

_Showing 12 of 44 filings._

| Filed | Form |
| --- | --- |
| 2026-01-23 | DEF 14A |
| [2025-02-24](https://search.stillhousedata.com/proxy/0000950170-25-025653) | DEFA14A |
| [2025-01-24](https://search.stillhousedata.com/proxy/0000950170-25-008792) | DEF 14A |
| [2024-01-19](https://search.stillhousedata.com/proxy/0000950170-24-005875) | DEF 14A |
| [2023-01-20](https://search.stillhousedata.com/proxy/0000950170-23-000975) | DEF 14A |
| [2022-01-18](https://search.stillhousedata.com/proxy/0000950170-22-000375) | DEF 14A |
| [2021-01-28](https://search.stillhousedata.com/proxy/0001564590-21-003033) | DEF 14A |
| [2020-01-24](https://search.stillhousedata.com/proxy/0001564590-20-001918) | DEF 14A |
| [2019-01-25](https://search.stillhousedata.com/proxy/0000720500-19-000002) | DEF 14A |
| [2018-04-05](https://search.stillhousedata.com/proxy/0000720500-18-000022) | DEF 14A |
| [2017-01-27](https://search.stillhousedata.com/proxy/0000720500-17-000010) | DEF 14A |
| [2016-03-03](https://search.stillhousedata.com/proxy/0000720500-16-000094) | DEFR14A |

## More

- [CIK 720500 on SEC EDGAR (source of record)](https://www.sec.gov/cgi-bin/browse-edgar?action=getcompany&CIK=720500&type=&dateb=&owner=include&count=40)
- [This page as markdown (for LLM agents)](https://search.stillhousedata.com/proxy/0001193125-26-020762.md)
- [Search all SEC filings, advisers and people on Adviser Search](https://search.stillhousedata.com/)

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Source: public SEC filing data via Adviser Search (https://search.stillhousedata.com).
Agents: this data is also queryable via MCP tools and read-only SQL — see https://search.stillhousedata.com/llms.txt.