# AXCELIS TECHNOLOGIES INC COM NEW

AXCELIS TECHNOLOGIES INC COM NEW is a security (CUSIP 054540208) tracked across SEC portfolio filings. 422 institutional managers reported $3.2B on Form 13F as of 2026-06-30; 33 registered fund positions totaling $115.3M via N-PORT as of 2026-05-31.

## Summary

- Issuer: AXCELIS TECHNOLOGIES INC
- Class: COM NEW
- CUSIP: 054540208
- Asset category: EC
- 13F holders: 422
- 13F value: $3.2B
- 13F period: 2026-06-30
- N-PORT fund positions: 33
- N-PORT value: $115.3M
- N-PORT report: 2026-05-31

## Top institutional holders (Form 13F)

_Showing 15 of 422 managers by value._

| Manager | Location | Value | Shares |
| --- | --- | --- | --- |
| BlackRock, Inc. | New York, NY | $459.5M | 4,936,774 |
| [VANGUARD GROUP INC](https://search.stillhousedata.com/firm/105958) | Valley Forge, PA | $331.2M | 4,122,529 |
| FMR LLC | BOSTON, MA | $226.3M | 2,431,121 |
| [REINHART PARTNERS, LLC.](https://search.stillhousedata.com/firm/106432) | MEQUON, WI | $175.9M | 928,660 |
| [Balyasny Asset Management L.P.](https://search.stillhousedata.com/firm/138111) | Chicago, IL | $127.0M | 1,364,540 |
| VICTORY CAPITAL MANAGEMENT INC | San Antonio, TX | $119.0M | 1,279,005 |
| STATE STREET CORP | BOSTON, MA | $110.7M | 1,189,045 |
| BNP PARIBAS ASSET MANAGEMENT Holding S.A. | Paris, I0 | $93.6M | 1,006,028 |
| AMERICAN CENTURY COMPANIES INC | KANSAS CITY, MO | $88.6M | 951,914 |
| DIMENSIONAL FUND ADVISORS LP | AUSTIN, TX | $78.6M | 844,097 |
| [GEODE CAPITAL MANAGEMENT, LLC](https://search.stillhousedata.com/firm/115504) | BOSTON, MA | $75.5M | 811,264 |
| Boston Trust Walden Corp | BOSTON, MA | $68.1M | 359,256 |
| [EMERALD ADVISERS, LLC](https://search.stillhousedata.com/firm/107496) | LEOLA, PA | $62.6M | 330,469 |
| [PRIMECAP MANAGEMENT CO/CA/](https://search.stillhousedata.com/firm/105516) | PASADENA, CA | $61.3M | 658,652 |
| Boston Partners | BOSTON, MA | $55.7M | 303,929 |

## Top fund holders (N-PORT)

_Showing 15 of 33 fund positions by value._

| Fund | Registrant | Value | % of fund |
| --- | --- | --- | --- |
| [VANGUARD EXTENDED MARKET INDEX FUND](https://search.stillhousedata.com/fund/S000002841) | VANGUARD INDEX FUNDS | $31.9M | 3.91% |
| [VANGUARD RUSSELL 2000 INDEX FUND](https://search.stillhousedata.com/fund/S000030003) | VANGUARD SCOTTSDALE FUNDS | $24.0M | 13.69% |
| [U.S. MICRO CAP PORTFOLIO](https://search.stillhousedata.com/fund/S000000948) | DFA INVESTMENT DIMENSIONS GROUP INC | $13.1M | 17.51% |
| [Emerald Growth Fund](https://search.stillhousedata.com/fund/S000036390) | FINANCIAL INVESTORS TRUST | $12.1M | 86.31% |
| [Embark Small Cap Equity Fund](https://search.stillhousedata.com/fund/S000083503) | Harbor Funds II | $5.3M | 92.28% |
| [Master Small Cap Index Series](https://search.stillhousedata.com/fund/S000002716) | Quantitative Master Series LLC | $4.8M | 9.91% |
| [HARTFORD SMALL CAP GROWTH HLS FUND](https://search.stillhousedata.com/fund/S000004108) | HARTFORD HLS SERIES FUND II INC | $3.8M | 49.36% |
| [T. Rowe Price New Horizons Fund, Inc.](https://search.stillhousedata.com/fund/S000002106) | T. ROWE PRICE NEW HORIZONS FUND, INC. | $3.6M | 2.84% |
| [VANGUARD STRATEGIC EQUITY FUND](https://search.stillhousedata.com/fund/S000002593) | VANGUARD HORIZON FUNDS | $2.5M | 2.52% |
| [BNY Mellon Smallcap Stock Index Fund](https://search.stillhousedata.com/fund/S000000132) | BNY MELLON INDEX FUNDS, INC. | $2.1M | 25.12% |
| ROYCE SMALL-CAP TRUST, INC. | ROYCE SMALL-CAP TRUST, INC. | $1.7M | 7.75% |
| [VANGUARD BALANCED INDEX FUND](https://search.stillhousedata.com/fund/S000002560) | VANGUARD VALLEY FORGE FUNDS | $1.6M | 0.27% |
| [VANGUARD INSTITUTIONAL TOTAL STOCK MARKET INDEX FUND](https://search.stillhousedata.com/fund/S000002855) | VANGUARD INSTITUTIONAL INDEX FUNDS | $1.4M | 0.46% |
| [GMO U.S. Equity Fund](https://search.stillhousedata.com/fund/S000004081) | GMO TRUST | $1.0M | 46.96% |
| [Goldman Sachs ActiveBeta(R) U.S. Small Cap Equity ETF](https://search.stillhousedata.com/fund/S000048296) | Goldman Sachs ETF Trust | $1.0M | 10.37% |

## More

- [This page as markdown (for LLM agents)](https://search.stillhousedata.com/security/054540208.md)
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Source: public SEC filing data via Adviser Search (https://search.stillhousedata.com).
Agents: this data is also queryable via MCP tools and read-only SQL — see https://search.stillhousedata.com/llms.txt.